Inventor
TSAI HUNG-YI
TW12 patents
⚠️ This page may combine multiple inventors who share the name “TSAI HUNG-YI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
8 patentsUS11204545B2Dec 21, 2021
EUV photo masks and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US12346027B2Jul 1, 2025
Methods of making a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12044960B2Jul 23, 2024
EUV photo masks and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11726399B2Aug 15, 2023
EUV photo masks and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12400864B2Aug 26, 2025
Methods and systems for improving plasma ignition stability
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12366797B2Jul 22, 2025
EUV photo masks and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12044959B2Jul 23, 2024
EUV photo masks and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11592737B2Feb 28, 2023
EUV photo masks and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60