Inventor
TSAI SZU-PING
TW3 patents
Patents
3 patentsUS12366797B2Jul 22, 2025
EUV photo masks and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12044959B2Jul 23, 2024
EUV photo masks and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11592737B2Feb 28, 2023
EUV photo masks and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60