Inventor
YABARA HIDEFUMI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “YABARA HIDEFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FUJITSU LTD
11 patentsUS6242751B1Jun 5, 2001
Charged-particle-beam exposure device and charged-particle-beam exposure method
FUJITSU LTD33 citations92
US6072185AJun 6, 2000
Charged-particle-beam exposure device and method capable of high-speed data reading
FUJITSU LTD29 citations92
US5969365AOct 19, 1999
Charged-particle-beam exposure device and charged-particle-beam exposure method
FUJITSU LTD20 citations92
US5757015AMay 26, 1998
Charged-particle-beam exposure device and charged-particle-beam exposure method
FUJITSU LTD25 citations92
US5719402AFeb 17, 1998
Method of and system for charged particle beam exposure
FUJITSU LTD32 citations92
US5546319AAug 13, 1996
Method of and system for charged particle beam exposure
FUJITSU LTD21 citations92
US5134398AJul 28, 1992
Digital-to-analog converter having a circuit for compensating for variation in output dependent on temperature change
FUJITSU LTD22 citations92
US5910658AJun 8, 1999
Method and system for changed particle beam exposure
FUJITSU LTD18 citations83
US5965895AOct 12, 1999
Method of providing changed particle beam exposure in which representative aligning marks on an object are detected to calculate an actual position to perform exposure
FUJITSU LTD13 citations82
US5721432AFeb 24, 1998
Method of and system for charged particle beam exposure
FUJITSU LTD16 citations82
US5808313ASep 15, 1998
Charged particle beam exposure method and charged particle beam exposure apparatus
FUJITSU LTD3 citations63