Inventor
WATANABE TOMOJI
JP10 patents
⚠️ This page may combine multiple inventors who share the name “WATANABE TOMOJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
8 patentsUS6518548B2Feb 11, 2003
Substrate temperature control system and method for controlling temperature of substrate
HITACHI LTD269 citations98
US6394797B1May 28, 2002
Substrate temperature control system and method for controlling temperature of substrate
HITACHI LTD182 citations98
US5001327AMar 19, 1991
Apparatus and method for performing heat treatment on semiconductor wafers
HITACHI LTD146 citations95
US6403479B1Jun 11, 2002
Process for producing semiconductor and apparatus for production
HITACHI LTD17 citations81
US5235399AAug 10, 1993
Temperature measuring apparatus utilizing radiation
HITACHI LTD20 citations79
US6288368B1Sep 11, 2001
Vacuum heating furnace with tapered portion
HITACHI LTD6 citations73
US6656838B2Dec 2, 2003
Process for producing semiconductor and apparatus for production
HITACHI LTD11 citations71
US6093911AJul 25, 2000
Vacuum heating furnace with tapered portion
HITACHI LTD2 citations62