Inventor
TSUMAKI NOBUO
JP12 patents
⚠️ This page may combine multiple inventors who share the name “TSUMAKI NOBUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
11 patentsUS6618692B2Sep 9, 2003
Remote diagnostic system and method for semiconductor manufacturing equipment
HITACHI LTD140 citations98
US4874273AOct 17, 1989
Apparatus for holding and/or conveying articles by fluid
HITACHI LTD419 citations98
US5258047ANov 2, 1993
Holder device and semiconductor producing apparatus having same
HITACHI LTD73 citations96
US5080195AJan 14, 1992
Method of supplying lubricant and apparatus for the same
HITACHI LTD78 citations96
US4630942ADec 23, 1986
Guiding apparatus
HITACHI LTD81 citations96
US6186153B1Feb 13, 2001
Plasma treatment method and manufacturing method of semiconductor device
HITACHI LTD25 citations91
US4579508AApr 1, 1986
Turbomolecular pump
HITACHI LTD43 citations91
US4602873AJul 29, 1986
Vibration-controlling bearing
HITACHI LTD29 citations90
US4593835AJun 10, 1986
Cryogenic liquefied pump system
HITACHI LTD33 citations89
US6288368B1Sep 11, 2001
Vacuum heating furnace with tapered portion
HITACHI LTD6 citations73
US6093911AJul 25, 2000
Vacuum heating furnace with tapered portion
HITACHI LTD2 citations62