Inventor
MIYATA TOSHIMITSU
JP10 patents
⚠️ This page may combine multiple inventors who share the name “MIYATA TOSHIMITSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI INT ELECTRIC INC
3 patentsUS6514869B2Feb 4, 2003
Method for use in manufacturing a semiconductor device
HITACHI INT ELECTRIC INC2 citations62
US7863204B2Jan 4, 2011
Substrate processing apparatus, heating apparatus for use in the same, method of manufacturing semiconductors with those apparatuses, and heating element supporting structure
HITACHI INT ELECTRIC INC3 citations61
US7842160B2Nov 30, 2010
Semiconductor producing device and semiconductor device producing method
HITACHI INT ELECTRIC INC5 citations60
HITACHI LTD
2 patentsHAYASHIDA AKIRA
2 patentsUS8116618B2Feb 14, 2012
Heating apparatus, substrate processing apparatus, and method of manufacturing semiconductor devices
HAYASHIDA AKIRA2 citations59
US9184069B2Nov 10, 2015
Heating apparatus, substrate processing apparatus employing the same, method of manufacturing semiconductor devices, and insulator
HAYASHIDA AKIRA1 citations48