Inventor
YU CHING-FANG
TW18 patents
⚠️ This page may combine multiple inventors who share the name “YU CHING-FANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
8 patentsUS10126644B2Nov 13, 2018
Pellicle for advanced lithography
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US9933699B2Apr 3, 2018
Pellicle aging estimation and particle removal from pellicle via acoustic waves
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US12429776B2Sep 30, 2025
Lithography method with reduced impacts of mask defects
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12265322B2Apr 1, 2025
EUV mask blank and method of making EUV mask blank
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11815804B2Nov 14, 2023
EUV mask blank and method of making EUV mask blank
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US10955746B2Mar 23, 2021
Lithography method with reduced impacts of mask defects
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10691017B2Jun 23, 2020
Pellicle for advanced lithography
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US9548209B2Jan 17, 2017
Method for integrated circuit fabrication
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations51
TAIWAN SEMICONDUCTOR MFG
3 patentsUS8980108B1Mar 17, 2015
Method for integrated circuit fabrication
TAIWAN SEMICONDUCTOR MFG7 citations83
US9354510B2May 31, 2016
EUV mask and method for forming the same
TAIWAN SEMICONDUCTOR MFG3 citations72
US9152035B2Oct 6, 2015
Lithographic photomask with inclined sides
TAIWAN SEMICONDUCTOR MFG1 citations51