Inventor

HSU TING-HAO

TW29 patents

⚠️ This page may combine multiple inventors who share the name “HSU TING-HAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HSU TING-HAO

TAIWAN SEMICONDUCTOR MFG CO LTD

Mask pellicle indicator for haze prevention

Semiconductor device and operation method thereof

Semiconductor device and operation method thereof

Pellicle for advanced lithography

Pellicle aging estimation and particle removal from pellicle via acoustic waves

High throughput and high position accurate method for particle inspection of mask pods

High throughput and high position accurate method for particle inspection of mask pods

Lithography method with reduced impacts of mask defects

Semiconductor device and operation method thereof

Lithography method with reduced impacts of mask defects

Lithography system and method for haze elimination

Method of fast surface particle and scratch detection for EUV mask backside

Method of fast surface particle and scratch detection for EUV mask backside

System and method for localized EUV pellicle glue removal

System and method for localized EUV pellicle glue removal

High throughput and high position accurate method for particle inspection of mask pods

Metal-insulator-semiconductor tunnel diode memory

Pellicle for advanced lithography

Method for integrated circuit fabrication

TAIWAN SEMICONDUCTOR MFG

Method for integrated circuit fabrication

EUV mask and method for forming the same

Lithographic photomask with inclined sides

Device manufacturing and cleaning method

YU CHING-FANG

EUV mask and method for forming the same

Method and apparatus for efficient defect inspection

LIN MEI-CHUN

Method and apparatus for defect identification

TEKTRO TECHNOLOGY CORP

Bicycle head and bicycle shift control box

LEE HSIN-CHANG

System and method for combined intraoverlay metrology and defect inspection

LU CHI-LUN

Device manufacturing and cleaning method