Inventor
RAUCH MORIZ V
5 patents
Patents
5 patentsUS4044255AAug 23, 1977
Corpuscular-beam transmission-type microscope including an improved beam deflection system
SIEMENS AG50 citations90
US4044254AAug 23, 1977
Scanning corpuscular-beam transmission type microscope including a beam energy analyzer
SIEMENS AG11 citations71
US4223224ASep 16, 1980
Charged-particle beam optical apparatus including a damped supplemental oscillator for the specimen holder thereof
SIEMENS AG7 citations70
US4031390AJun 21, 1977
Method of operating a particle-beam apparatus
SIEMENS AG7 citations70
US4097739AJun 27, 1978
Beam deflection and focusing system for a scanning corpuscular-beam microscope
SIEMENS AG6 citations61