Inventor
NAKAMORI MITSUNORI
JP20 patents
⚠️ This page may combine multiple inventors who share the name “NAKAMORI MITSUNORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
16 patentsUS6589338B1Jul 8, 2003
Device for processing substrate
TOKYO ELECTRON LTD110 citations97
US6979655B2Dec 27, 2005
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD22 citations92
US6863741B2Mar 8, 2005
Cleaning processing method and cleaning processing apparatus
TOKYO ELECTRON LTD37 citations92
US8043469B2Oct 25, 2011
Substrate processing method, substrate processing apparatus, and storage medium
TOKYO ELECTRON LTD19 citations84
US9953840B2Apr 24, 2018
Substrate processing method and substrate processing system
TOKYO ELECTRON LTD5 citations72
US11935736B2Mar 19, 2024
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD2 citations63
US11938524B2Mar 26, 2024
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD1 citations62
US10026629B2Jul 17, 2018
Substrate liquid processing apparatus, substrate liquid processing method, and computer-readable storage medium storing substrate liquid processing program
TOKYO ELECTRON LTD2 citations62
US7914626B2Mar 29, 2011
Liquid processing method and liquid processing apparatus
TOKYO ELECTRON LTD4 citations61
US10727042B2Jul 28, 2020
Liquid processing method, substrate processing apparatus and recording medium
TOKYO ELECTRON LTD1 citations59
US7731799B2Jun 8, 2010
Substrate processing method, substrate processing apparatus and computer-readable memory medium
TOKYO ELECTRON LTD1 citations52
US11723259B2Aug 8, 2023
Substrate processing apparatus and method of processing substrate
TOKYO ELECTRON LTD0 citations51
US7767006B2Aug 3, 2010
Ozone processing apparatus and ozone processing method
TOKYO ELECTRON LTD1 citations51
US7693597B2Apr 6, 2010
Computer readable storage medium for controlling substrate processing apparatus
TOKYO ELECTRON LTD0 citations41
US10366877B2Jul 30, 2019
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations40
US10867814B2Dec 15, 2020
Liquid processing method, substrate processing apparatus, and storage medium
TOKYO ELECTRON LTD0 citations39
NAKAMORI MITSUNORI
2 patentsUS8617656B2Dec 31, 2013
Liquid processing apparatus, liquid processing method, and storage medium
NAKAMORI MITSUNORI0 citations46
US9095953B2Aug 4, 2015
Apparatus for polishing rear surface of substrate, system for polishing rear surface of substrate, method for polishing rear surface of substrate and recording medium having program for polishing rear surface of substrate
NAKAMORI MITSUNORI0 citations45