Inventor

ATOH KOJI

JP4 patents

Patents

4 patents

US6643882B1Nov 11, 2003

Substrate cleaning apparatus

EBARA CORP64 citations95

US6560809B1May 13, 2003

Substrate cleaning apparatus

EBARA CORP23 citations89

US6842933B2Jan 18, 2005

Substrate cleaning apparatus and cleaning member

EBARA CORP5 citations71

US6651287B2Nov 25, 2003

Substrate cleaning apparatus and cleaning member

EBARA CORP10 citations71