Inventor
CHILCOTT DAN W
US23 patents
⚠️ This page may combine multiple inventors who share the name “CHILCOTT DAN W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DELPHI TECH INC
17 patentsUS7908922B2Mar 22, 2011
Silicon integrated angular rate sensor
DELPHI TECH INC118 citations96
US7645627B2Jan 12, 2010
Method for manufacturing a sensor device
DELPHI TECH INC48 citations93
US7250322B2Jul 31, 2007
Method of making microsensor
DELPHI TECH INC29 citations92
US6828560B2Dec 7, 2004
Integrated light concentrator
DELPHI TECH INC19 citations92
US7134179B2Nov 14, 2006
Process of forming a capacitative audio transducer
DELPHI TECH INC17 citations91
US6829814B1Dec 14, 2004
Process of making an all-silicon microphone
DELPHI TECH INC28 citations91
US6750521B1Jun 15, 2004
Surface mount package for a micromachined device
DELPHI TECH INC44 citations91
US6828172B2Dec 7, 2004
Process for a monolithically-integrated micromachined sensor and circuit
DELPHI TECH INC24 citations90
US6793389B2Sep 21, 2004
Monolithically-integrated infrared sensor
DELPHI TECH INC25 citations90
US7303936B2Dec 4, 2007
Method for forming anti-stiction bumps on a micro-electro mechanical structure
DELPHI TECH INC13 citations84
US7180064B2Feb 20, 2007
Infrared sensor package
DELPHI TECH INC9 citations73
US7524767B2Apr 28, 2009
Method for manufacturing a micro-electro-mechanical structure
DELPHI TECH INC2 citations63
US7214324B2May 8, 2007
Technique for manufacturing micro-electro mechanical structures
DELPHI TECH INC3 citations63
US7160751B2Jan 9, 2007
Method of making a SOI silicon structure
DELPHI TECH INC5 citations63
US7179668B2Feb 20, 2007
Technique for manufacturing silicon structures
DELPHI TECH INC6 citations62
US7534641B2May 19, 2009
Method for manufacturing a micro-electro-mechanical device
DELPHI TECH INC0 citations52
US7510894B2Mar 31, 2009
Post-logic isolation of silicon regions for an integrated sensor
DELPHI TECH INC0 citations42
DELCO ELECTRONICS CORP
4 patentsUS5413955AMay 9, 1995
Method of bonding silicon wafers at temperatures below 500 degrees centigrade for sensor applications
DELCO ELECTRONICS CORP43 citations92
US5369057ANov 29, 1994
Method of making and sealing a semiconductor device having an air path therethrough
DELCO ELECTRONICS CORP22 citations92
US5177331AJan 5, 1993
Impact detector
DELCO ELECTRONICS CORP26 citations92
US5385652AJan 31, 1995
Method of etching using a silver/silver oxide reference electrode
DELCO ELECTRONICS CORP5 citations62