Inventor
HAYAKAWA KOHICHI
JP5 patents
Patents
5 patentsUS6759655B2Jul 6, 2004
Inspection method, apparatus and system for circuit pattern
HITACHI LTD74 citations98
US6919564B2Jul 19, 2005
Inspection method, apparatus and system for circuit pattern
HITACHI LTD23 citations96
US6493082B2Dec 10, 2002
Inspection method, apparatus and system for circuit pattern
HITACHI LTD35 citations96
US6476913B1Nov 5, 2002
Inspection method, apparatus and system for circuit pattern
HITACHI LTD59 citations96
US6903821B2Jun 7, 2005
Inspection method, apparatus and system for circuit pattern
HITACHI LTD15 citations92