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Inventor
UEMATSU TOSHIHIDE
JP
8 patents
⚠️ This page may combine multiple inventors who share the name “UEMATSU TOSHIHIDE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
2 patents
US5015425A
May 14, 1991
Manufacturing apparatus
HITACHI LTD
26 citations
91
US4890780A
Jan 2, 1990
Manufacturing apparatus
HITACHI LTD
40 citations
91
RENESAS TECH CORP
2 patents
US7759224B2
Jul 20, 2010
Fabrication method of semiconductor integrated circuit device
RENESAS TECH CORP
4 citations
61
US7452787B2
Nov 18, 2008
Fabrication method of semiconductor integrated circuit device
RENESAS TECH CORP
4 citations
61
ROHM CO LTD
1 patent
US8883566B2
Nov 11, 2014
Method of manufacturing semiconductor device, semiconductor device and multilayer wafer structure
ROHM CO LTD
5 citations
72
ABE YOSHIYUKI
1 patent
US8546244B2
Oct 1, 2013
Method of manufacturing semiconductor device
ABE YOSHIYUKI
2 citations
62
MORIFUJI TADAHIRO
1 patent
US8729698B2
May 20, 2014
Method of manufacturing semiconductor device, semiconductor device and multilayer wafer structure
MORIFUJI TADAHIRO
3 citations
60
RENESAS ELECTRONICS CORP
1 patent
US8378459B2
Feb 19, 2013
Semiconductor device, semiconductor wafer and manufacturing method of the same
RENESAS ELECTRONICS CORP
0 citations
46