Inventor
BELITSKY VICTOR
US8 patents
Patents
8 patentsUS6283692B1Sep 4, 2001
Apparatus for storing and moving a cassette
APPLIED MATERIALS INC474 citations97
US6082951AJul 4, 2000
Wafer cassette load station
APPLIED MATERIALS INC104 citations97
US6139406AOct 31, 2000
Combined slurry dispenser and rinse arm and method of operation
APPLIED MATERIALS INC103 citations95
US5899801AMay 4, 1999
Method and apparatus for removing a substrate from a polishing pad in a chemical mechanical polishing system
APPLIED MATERIALS INC65 citations95
US6280299B1Aug 28, 2001
Combined slurry dispenser and rinse arm
APPLIED MATERIALS INC54 citations94
US7637707B2Dec 29, 2009
Apparatus for storing and moving a cassette
APPLIED MATERIALS INC16 citations91
US6379221B1Apr 30, 2002
Method and apparatus for automatically changing a polishing pad in a chemical mechanical polishing system
APPLIED MATERIALS INC34 citations89
US7578647B2Aug 25, 2009
Load port configurations for small lot size substrate carriers
APPLIED MATERIALS INC4 citations63