Inventor

OKUBO SHINGO

JP8 patents

⚠️ This page may combine multiple inventors who share the name “OKUBO SHINGO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

OKUBO SHINGO

2 patents

US8101237B2Jan 24, 2012

Tellurium precursors for film deposition

OKUBO SHINGO7 citations81

US8236381B2Aug 7, 2012

Metal piperidinate and metal pyridinate precursors for thin film deposition

OKUBO SHINGO16 citations79

HITACHI INT ELECTRIC INC

2 patents

US9548198B2Jan 17, 2017

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC4 citations72

US9343290B2May 17, 2016

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC6 citations72

L AIR LIQUIDE SOCIÉTÉ ANONYME POUR L ETUDE ET L EXPL DES PROCÉDÉS GEORGES CLAUDE

1 patent

US9109281B2Aug 18, 2015

Metal heterocyclic compounds for deposition of thin films

L AIR LIQUIDE SOCIÉTÉ ANONYME POUR L ETUDE ET L EXPL DES PROCÉDÉS GEORGES CLAUDE6 citations83

GATINEAU JULIEN

1 patent

US8636845B2Jan 28, 2014

Metal heterocyclic compounds for deposition of thin films

GATINEAU JULIEN6 citations82

L'Air Liquide Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude

1 patent

US9633838B2Apr 25, 2017

Vapor deposition of silicon-containing films using penta-substituted disilanes

L'Air Liquide Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude4 citations70

AIR LIQUIDE

1 patent

US12473640B2Nov 18, 2025

Supply system for low volatility precursors

AIR LIQUIDE0 citations49