Inventor
LIU YU-TSAI
TW6 patents
⚠️ This page may combine multiple inventors who share the name “LIU YU-TSAI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
(unassigned)
5 patentsUS6405739B1Jun 18, 2002
Spin chuck capable of providing simultaneous dual-sided processing
20 citations89
US6439207B1Aug 27, 2002
Generator of high oxygen molecule
17 citations80
US6315832B1Nov 13, 2001
Single chamber processing apparatus having multi-chamber functions
18 citations80
US6273344B1Aug 14, 2001
Dispensing nozzle device
9 citations70
US6221204B1Apr 24, 2001
Stackable chamber apparatus
13 citations70