Inventor
SA SEUNG YOUB
KR5 patents
Patents
5 patentsUS12522924B2Jan 13, 2026
Substrate processing device
JUSUNG ENG CO LTD0 citations53
US12417898B2Sep 16, 2025
Substrate processing apparatus
JUSUNG ENG CO LTD0 citations53
US12188126B2Jan 7, 2025
Substrate processing apparatus
JUSUNG ENG CO LTD0 citations47
US10818534B2Oct 27, 2020
Substrate processing apparatus arranged in process chamber and operating method thereof
JUSUNG ENG CO LTD0 citations45
US10229849B2Mar 12, 2019
Substrate processing apparatus arranged in process chamber and operating method thereof
JUSUNG ENG CO LTD0 citations45