Inventor

WOO RAM

KR3 patents

⚠️ This page may combine multiple inventors who share the name “WOO RAM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

JUSUNG ENG CO LTD

2 patents

US10818534B2Oct 27, 2020

Substrate processing apparatus arranged in process chamber and operating method thereof

JUSUNG ENG CO LTD0 citations45

US10229849B2Mar 12, 2019

Substrate processing apparatus arranged in process chamber and operating method thereof

JUSUNG ENG CO LTD0 citations45

HANWHA PREC MACH CO LTD

1 patent

US12522925B2Jan 13, 2026

Thin film deposition apparatus having multi-stage heaters and thin film deposition method using the same

HANWHA PREC MACH CO LTD0 citations45