Inventor
HER HO BOEM
KR3 patents
Patents
3 patentsUS12417898B2Sep 16, 2025
Substrate processing apparatus
JUSUNG ENG CO LTD0 citations53
US10818534B2Oct 27, 2020
Substrate processing apparatus arranged in process chamber and operating method thereof
JUSUNG ENG CO LTD0 citations45
US10229849B2Mar 12, 2019
Substrate processing apparatus arranged in process chamber and operating method thereof
JUSUNG ENG CO LTD0 citations45