Inventor

CHIOU YI-CHING

TW2 patents

Patents

2 patents

US10272540B2Apr 30, 2019

System and method for polishing substrate

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations67

US9669514B2Jun 6, 2017

System and method for polishing substrate

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations46