P

Inventor

YUDITSKY YURY

US8 patents
⚠️ This page may combine multiple inventors who share the name “YUDITSKY YURY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

5 patents
US9426400B2Aug 23, 2016

Method and apparatus for high speed acquisition of moving images using pulsed illumination

KLA TENCOR CORP32 citations93
US10488348B2Nov 26, 2019

Wafer inspection

KLA TENCOR CORP3 citations72
US9915622B2Mar 13, 2018

Wafer inspection

KLA TENCOR CORP0 citations51
US9587936B2Mar 7, 2017

Scanning inspection system with angular correction

KLA TENCOR CORP0 citations39
US10495579B2Dec 3, 2019

System and method for compensation of illumination beam misalignment

KLA TENCOR CORP0 citations32

ROMANOVSKY ANATOLY

1 patent
US9279774B2Mar 8, 2016

Wafer inspection

ROMANOVSKY ANATOLY29 citations91

KLA CORP

1 patent
US12345658B2Jul 1, 2025

Large-particle monitoring with laser power control for defect inspection

KLA CORP0 citations57

CAI ZHONGPING

1 patent
US9091666B2Jul 28, 2015

Extended defect sizing range for wafer inspection

CAI ZHONGPING2 citations54