Inventor
GUNDLACH MAXIMILIAN
US4 patents
Patents
4 patentsUS10969019B2Apr 6, 2021
Fluid control device, recording medium recorded with control program, and control method
HORIBA STEC CO LTD4 citations70
US10545514B2Jan 28, 2020
Flow rate control apparatus, flow rate control method, and program recording medium
HORIBA STEC CO LTD3 citations68
US11789472B2Oct 17, 2023
Gas delivery system with electrical backplane
HORIBA STEC CO LTD0 citations59
US12153455B2Nov 26, 2024
Flow rate ratio control device, control program for a flow rate ratio control device and control method for a flow rate ratio control device
HORIBA STEC CO LTD0 citations48