Inventor
WU DEE
CN7 patents
Patents
7 patentsUS11363680B2Jun 14, 2022
Plasma reactor and heating apparatus therefor
ADVANCED MICRO FABRICATION EQUIPMENT INC CHINA0 citations59
US12094693B2Sep 17, 2024
Bottom electrode assembly, plasma processing apparatus, and method of replacing focus ring
ADVANCED MICRO FABRICATION EQUIPMENT INC CHINA0 citations50
US12341037B2Jun 24, 2025
Temperature control apparatus for semiconductor processing equipment, and temperature control method for the same
ADVANCED MICRO FABRICATION EQUIPMENT INC CHINA0 citations49
US12573595B2Mar 10, 2026
Plasma processing apparatus and method of adjusting the same
ADVANCED MICRO FABRICATION EQUIPMENT INC CHINA0 citations47
US12309891B2May 20, 2025
Control method for multi-zone active-matrix temperature control in plasma processing apparatus
ADVANCED MICRO FABRICATION EQUIPMENT INC CHINA0 citations46
US11348763B2May 31, 2022
Corrosion-resistant structure for a gas delivery system in a plasma processing apparatus
ADVANCED MICRO FABRICATION EQUIPMENT INC CHINA0 citations46
US11387084B2Jul 12, 2022
Uniform pumping dual-station vacuum processor
ADVANCED MICRO FABRICATION EQUIPMENT INC CHINA0 citations43