Inventor

FLUEGGE OLE

DE5 patents

⚠️ This page may combine multiple inventors who share the name “FLUEGGE OLE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EVA ERIC

2 patents

US8891172B2Nov 18, 2014

Optical element and method

EVA ERIC7 citations81

US8508854B2Aug 13, 2013

Optical element and method

EVA ERIC12 citations81

HAUF MARKUS

1 patent

US8325322B2Dec 4, 2012

Optical correction device

HAUF MARKUS16 citations81

ZEISS CARL SMT AG

1 patent

US7768721B2Aug 3, 2010

Optical assembly, projection exposure apparatus and projection objective

ZEISS CARL SMT AG3 citations56

ZEISS CARL SMT GMBH

1 patent

US11740562B2Aug 29, 2023

Sealing device, component and lithography apparatus

ZEISS CARL SMT GMBH0 citations54