Inventor
POKROVSKIY NIKOLAY
US3 patents
Patents
3 patentsUS11746004B2Sep 5, 2023
Low-parasitic capacitance MEMS inertial sensors and related methods
ANALOG DEVICES INC0 citations57
US11279614B2Mar 22, 2022
Low-parasitic capacitance MEMS inertial sensors and related methods
ANALOG DEVICES INC1 citations57
US11981560B2May 14, 2024
Stress-isolated MEMS device comprising substrate having cavity and method of manufacture
ANALOG DEVICES INC0 citations56