Inventor
CHO SUNGSIL
KR5 patents
Patents
5 patentsUS12071688B2Aug 27, 2024
Precursors and methods for preparing silicon-containing films
ENTEGRIS INC0 citations60
US12037681B2Jul 16, 2024
Method for forming carbon rich silicon-containing films
ENTEGRIS INC0 citations59
US11414750B2Aug 16, 2022
Method for forming carbon rich silicon-containing films
ENTEGRIS INC0 citations59
US12347672B2Jul 1, 2025
Silicon precursor compounds and method for forming silicon-containing films
ENTEGRIS INC0 citations56
US12264392B2Apr 1, 2025
Silicon precursor compounds and method for forming silicon-containing films
ENTEGRIS INC0 citations49