Inventor
SHEN CHENFEI
US4 patents
⚠️ This page may combine multiple inventors who share the name “SHEN CHENFEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
3 patentsUS11830725B2Nov 28, 2023
Method of cleaning a structure and method of depositing a capping layer in a structure
APPLIED MATERIALS INC0 citations61
US12062545B2Aug 13, 2024
Fluorine-free tungsten ALD for dielectric selectivity improvement
APPLIED MATERIALS INC0 citations49
US12305278B2May 20, 2025
Method of reducing titanium nitride etching during tungsten film formation
APPLIED MATERIALS INC0 citations48