Inventor

HAIMOVICH ELI

US4 patents

Patents

4 patents

US6045433AApr 4, 2000

Apparatus for optical inspection of wafers during polishing

NOVA MEASURING INSTR LTD91 citations95

US6368181B1Apr 9, 2002

Apparatus for optical inspection of wafers during polishing

NOVA MEASURING INSTR LTD19 citations90

US6543461B2Apr 8, 2003

Buffer system for a wafer handling system field of the invention

NOVA MEASURING INSTR LTD6 citations60

US6368182B2Apr 9, 2002

Apparatus for optical inspection of wafers during polishing

NOVA MEASURING INSTR LTD5 citations57