Inventor
FAN YIWEN
US8 patents
⚠️ This page may combine multiple inventors who share the name “FAN YIWEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
7 patentsUS12105422B2Oct 1, 2024
Photoresist development with halide chemistries
LAM RES CORP13 citations94
US12510825B2Dec 30, 2025
Photoresist development with halide chemistries
LAM RES CORP2 citations74
US12510826B2Dec 30, 2025
Photoresist development with halide chemistries
LAM RES CORP2 citations74
US11935758B2Mar 19, 2024
Atomic layer etching for subtractive metal etch
LAM RES CORP2 citations71
US12417902B2Sep 16, 2025
Method for cleaning a chamber
LAM RES CORP0 citations61
US12266542B2Apr 1, 2025
Atomic layer etching for subtractive metal etch
LAM RES CORP0 citations61
US12256645B2Mar 18, 2025
Chemical etch nonvolatile materials for MRAM patterning
LAM RES CORP0 citations47