Inventor
WEIDMAN TIMOTHY WILLIAM
US13 patents
⚠️ This page may combine multiple inventors who share the name “WEIDMAN TIMOTHY WILLIAM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
12 patentsUS12105422B2Oct 1, 2024
Photoresist development with halide chemistries
LAM RES CORP13 citations94
US12278125B2Apr 15, 2025
Integrated dry processes for patterning radiation photoresist patterning
LAM RES CORP8 citations85
US12211691B2Jan 28, 2025
Dry development of resists
LAM RES CORP8 citations84
US12183604B2Dec 31, 2024
Integrated dry processes for patterning radiation photoresist patterning
LAM RES CORP9 citations84
US12510826B2Dec 30, 2025
Photoresist development with halide chemistries
LAM RES CORP2 citations74
US12510825B2Dec 30, 2025
Photoresist development with halide chemistries
LAM RES CORP2 citations74
US12504692B2Dec 23, 2025
Cyclic development of metal oxide based photoresist for etch stop deterrence
LAM RES CORP2 citations74
US12346035B2Jul 1, 2025
Process tool for dry removal of photoresist
LAM RES CORP6 citations73
US12436464B2Oct 7, 2025
Pre-exposure photoresist curing to enhance EUV lithographic performance
LAM RES CORP2 citations69
US11921427B2Mar 5, 2024
Methods for making hard masks useful in next-generation lithography
LAM RES CORP4 citations69
US12577466B2Mar 17, 2026
Photoresist development with organic vapor
LAM RES CORP0 citations56
US12585184B2Mar 24, 2026
Photoresist with multiple patterning radiation-absorbing elements and/or vertical composition gradient
LAM RES CORP0 citations44