Inventor
SAIKI KEIICHI
JP4 patents
⚠️ This page may combine multiple inventors who share the name “SAIKI KEIICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
3 patentsUS6583634B1Jun 24, 2003
Method of inspecting circuit pattern and inspecting instrument
HITACHI LTD68 citations96
US6703850B2Mar 9, 2004
Method of inspecting circuit pattern and inspecting instrument
HITACHI LTD37 citations92
US6597448B1Jul 22, 2003
Apparatus and method of inspecting foreign particle or defect on a sample
HITACHI LTD44 citations92