P

Inventor

MORIOKA HIROSHI

JP40 patents
⚠️ This page may combine multiple inventors who share the name “MORIOKA HIROSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI LTD

16 patents
US5463459AOct 31, 1995

Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process

HITACHI LTD145 citations99
US5274434ADec 28, 1993

Method and apparatus for inspecting foreign particles on real time basis in semiconductor mass production line

HITACHI LTD218 citations99
US6759655B2Jul 6, 2004

Inspection method, apparatus and system for circuit pattern

HITACHI LTD74 citations98
US5233191AAug 3, 1993

Method and apparatus of inspecting foreign matters during mass production start-up and mass production line in semiconductor production process

HITACHI LTD145 citations98
US6919564B2Jul 19, 2005

Inspection method, apparatus and system for circuit pattern

HITACHI LTD23 citations96
US6583634B1Jun 24, 2003

Method of inspecting circuit pattern and inspecting instrument

HITACHI LTD68 citations96
US6493082B2Dec 10, 2002

Inspection method, apparatus and system for circuit pattern

HITACHI LTD35 citations96
US6480279B2Nov 12, 2002

Inspection method, apparatus and system for circuit pattern

HITACHI LTD23 citations96
US6476913B1Nov 5, 2002

Inspection method, apparatus and system for circuit pattern

HITACHI LTD59 citations96
US6421122B2Jul 16, 2002

Inspection method, apparatus and system for circuit pattern

HITACHI LTD51 citations96
US6388747B2May 14, 2002

Inspection method, apparatus and system for circuit pattern

HITACHI LTD62 citations96
US7116816B2Oct 3, 2006

Method of inspecting a pattern and an apparatus thereof and a method of processing a specimen

HITACHI LTD41 citations93
US6903821B2Jun 7, 2005

Inspection method, apparatus and system for circuit pattern

HITACHI LTD15 citations92
US6703850B2Mar 9, 2004

Method of inspecting circuit pattern and inspecting instrument

HITACHI LTD37 citations92
US6650409B1Nov 18, 2003

Semiconductor device producing method, system for carrying out the same and semiconductor work processing apparatus included in the same system

HITACHI LTD39 citations92
US6504609B2Jan 7, 2003

Inspection method, apparatus and system for circuit pattern

HITACHI LTD7 citations74

TOYOTA MOTOR CO LTD

6 patents

FUJITSU MICROELECTRONICS LTD

4 patents

RENESAS TECH CORP

2 patents

NISSEI BUILD KOGYO KK

2 patents

FUJITSU LTD

2 patents

PANASONIC IP MAN CO LTD

2 patents

FUJITSU SEMICONDUCTOR LTD

2 patents

HASEGAWA OSAMU

1 patent

NEC CORP

1 patent

MORIOKA HIROSHI

1 patent

ARIYOSHI JUNICHI

1 patent