P

Inventor

MIYAI HIROSHI

JP55 patents
⚠️ This page may combine multiple inventors who share the name “MIYAI HIROSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI LTD

21 patents
US6865288B1Mar 8, 2005

Pattern inspection method and apparatus

HITACHI LTD75 citations98
US6465781B1Oct 15, 2002

Method and apparatus for inspecting or measuring a sample based on charged-particle beam imaging, and a charged-particle beam apparatus

HITACHI LTD85 citations97
US6952492B2Oct 4, 2005

Method and apparatus for inspecting a semiconductor device

HITACHI LTD50 citations96
US6583634B1Jun 24, 2003

Method of inspecting circuit pattern and inspecting instrument

HITACHI LTD68 citations96
US5933473AAug 3, 1999

Non-destructive inspection apparatus and inspection system using it

HITACHI LTD39 citations95
US7133550B2Nov 7, 2006

Pattern inspection method and apparatus

HITACHI LTD19 citations93
US7116816B2Oct 3, 2006

Method of inspecting a pattern and an apparatus thereof and a method of processing a specimen

HITACHI LTD41 citations93
US6975754B2Dec 13, 2005

Circuit pattern inspection method and apparatus

HITACHI LTD19 citations93
US6898305B2May 24, 2005

Circuit pattern inspection method and apparatus

HITACHI LTD40 citations93
US7269280B2Sep 11, 2007

Method and its apparatus for inspecting a pattern

HITACHI LTD22 citations92
US6703850B2Mar 9, 2004

Method of inspecting circuit pattern and inspecting instrument

HITACHI LTD37 citations92
US6333962B1Dec 25, 2001

Non-destructive inspection apparatus and inspection system using it

HITACHI LTD21 citations92
US5640462AJun 17, 1997

Imaging method of X-ray computerized tomography and apparatus for X-ray computerized tomography

HITACHI LTD23 citations92
US7266235B2Sep 4, 2007

Pattern inspection method and apparatus

HITACHI LTD10 citations84
US7957579B2Jun 7, 2011

Pattern inspection method and apparatus

HITACHI LTD5 citations74
US7894658B2Feb 22, 2011

Pattern inspection method and apparatus

HITACHI LTD4 citations74
US7457453B2Nov 25, 2008

Pattern inspection method and apparatus

HITACHI LTD4 citations74
US7116817B2Oct 3, 2006

Method and apparatus for inspecting a semiconductor device

HITACHI LTD10 citations74
US6613593B2Sep 2, 2003

Method of fabricating a semiconductor device

HITACHI LTD8 citations74
US6049586AApr 11, 2000

Non-destructive inspection apparatus and inspection system using it

HITACHI LTD13 citations73
US7049587B2May 23, 2006

Apparatus for inspecting a specimen

HITACHI LTD2 citations62

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD

11 patents

HITACHI HIGH TECH CORP

8 patents

PANASONIC CORP

3 patents

MIHARA KAZUHIRO

2 patents

SAIGO KATSUO

1 patent

HIROI TAKASHI

1 patent

NOZOE MARI

1 patent

MATSUMOTO KEIZO

1 patent

OMINAMI YUSUKE

1 patent

Showing the top 50 of 55 patents by PatentIndex Score.