P

Inventor

MULLER RICHARD S

US27 patents
⚠️ This page may combine multiple inventors who share the name “MULLER RICHARD S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

UNIV CALIFORNIA

21 patents
US5867297AFeb 2, 1999

Apparatus and method for optical scanning with an oscillatory microelectromechanical system

UNIV CALIFORNIA131 citations98
US5493177AFeb 20, 1996

Sealed micromachined vacuum and gas filled devices

UNIV CALIFORNIA240 citations98
US5285131AFeb 8, 1994

Vacuum-sealed silicon incandescent light

UNIV CALIFORNIA128 citations98
US5945898AAug 31, 1999

Magnetic microactuator

UNIV CALIFORNIA146 citations96
US4674319AJun 23, 1987

Integrated circuit sensor

UNIV CALIFORNIA131 citations96
US4740410AApr 26, 1988

Micromechanical elements and methods for their fabrication

UNIV CALIFORNIA192 citations95
US6758983B2Jul 6, 2004

Staggered torsional electrostatic combdrive and method of forming same

UNIV CALIFORNIA69 citations94
US4783821ANov 8, 1988

IC processed piezoelectric microphone

UNIV CALIFORNIA70 citations94
US5252881AOct 12, 1993

Micro motors and method for their fabrication

UNIV CALIFORNIA86 citations92
US4608865ASep 2, 1986

Integrated pyroelectric sensor and method

UNIV CALIFORNIA26 citations92
US4816125AMar 28, 1989

IC processed piezoelectric microphone

UNIV CALIFORNIA51 citations91
US7079299B1Jul 18, 2006

Staggered torsional electrostatic combdrive and method of forming same

UNIV CALIFORNIA35 citations90
US7564559B2Jul 21, 2009

MEMS-based, phase-shifting interferometer

UNIV CALIFORNIA23 citations89
US4849695AJul 18, 1989

Null-detection magnetometers

UNIV CALIFORNIA40 citations87
US4801883AJan 31, 1989

Integrated-circuit one-way isolation coupler incorporating one or several carrier-domain magnetometers

UNIV CALIFORNIA37 citations87
US7573022B2Aug 11, 2009

Method for fabricating vertically-offset interdigitated comb actuator device

UNIV CALIFORNIA14 citations81
US6962830B1Nov 8, 2005

Global mechanical stop

UNIV CALIFORNIA5 citations74
US7301177B2Nov 27, 2007

Method for directing an optical beam and a method for manufacturing an apparatus for directing an optical beam

UNIV CALIFORNIA1 citations63
US6897539B2May 24, 2005

Method for directing an optical beam and a method for manufacturing an apparatus for directing an optical beam

UNIV CALIFORNIA3 citations63
US7656568B2Feb 2, 2010

Optical switch using frequency-based addressing in a microelectromechanical systems array

UNIV CALIFORNIA2 citations62
US7355793B2Apr 8, 2008

Optical system applicable to improving the dynamic range of Shack-Hartmann sensors

UNIV CALIFORNIA3 citations62

ECOLOCHEM INC

2 patents

SIGNETICS CORP

2 patents

MULLER RICHARD S

1 patent

GARMIRE DAVID

1 patent