Inventor
MULLER RICHARD S
US27 patents
⚠️ This page may combine multiple inventors who share the name “MULLER RICHARD S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNIV CALIFORNIA
21 patentsUS5867297AFeb 2, 1999
Apparatus and method for optical scanning with an oscillatory microelectromechanical system
UNIV CALIFORNIA131 citations98
US5493177AFeb 20, 1996
Sealed micromachined vacuum and gas filled devices
UNIV CALIFORNIA240 citations98
US5285131AFeb 8, 1994
Vacuum-sealed silicon incandescent light
UNIV CALIFORNIA128 citations98
US5945898AAug 31, 1999
Magnetic microactuator
UNIV CALIFORNIA146 citations96
US4674319AJun 23, 1987
Integrated circuit sensor
UNIV CALIFORNIA131 citations96
US4740410AApr 26, 1988
Micromechanical elements and methods for their fabrication
UNIV CALIFORNIA192 citations95
US6758983B2Jul 6, 2004
Staggered torsional electrostatic combdrive and method of forming same
UNIV CALIFORNIA69 citations94
US4783821ANov 8, 1988
IC processed piezoelectric microphone
UNIV CALIFORNIA70 citations94
US5252881AOct 12, 1993
Micro motors and method for their fabrication
UNIV CALIFORNIA86 citations92
US4608865ASep 2, 1986
Integrated pyroelectric sensor and method
UNIV CALIFORNIA26 citations92
US4816125AMar 28, 1989
IC processed piezoelectric microphone
UNIV CALIFORNIA51 citations91
US7079299B1Jul 18, 2006
Staggered torsional electrostatic combdrive and method of forming same
UNIV CALIFORNIA35 citations90
US7564559B2Jul 21, 2009
MEMS-based, phase-shifting interferometer
UNIV CALIFORNIA23 citations89
US4849695AJul 18, 1989
Null-detection magnetometers
UNIV CALIFORNIA40 citations87
US4801883AJan 31, 1989
Integrated-circuit one-way isolation coupler incorporating one or several carrier-domain magnetometers
UNIV CALIFORNIA37 citations87
US7573022B2Aug 11, 2009
Method for fabricating vertically-offset interdigitated comb actuator device
UNIV CALIFORNIA14 citations81
US6962830B1Nov 8, 2005
Global mechanical stop
UNIV CALIFORNIA5 citations74
US7301177B2Nov 27, 2007
Method for directing an optical beam and a method for manufacturing an apparatus for directing an optical beam
UNIV CALIFORNIA1 citations63
US6897539B2May 24, 2005
Method for directing an optical beam and a method for manufacturing an apparatus for directing an optical beam
UNIV CALIFORNIA3 citations63
US7656568B2Feb 2, 2010
Optical switch using frequency-based addressing in a microelectromechanical systems array
UNIV CALIFORNIA2 citations62
US7355793B2Apr 8, 2008
Optical system applicable to improving the dynamic range of Shack-Hartmann sensors
UNIV CALIFORNIA3 citations62