Inventor

ROWAN JR ROBERT C

US2 patents

⚠️ This page may combine multiple inventors who share the name “ROWAN JR ROBERT C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

1 patent

US7001491B2Feb 21, 2006

Vacuum-processing chamber-shield and multi-chamber pumping method

TOKYO ELECTRON LTD45 citations91

ALLIED SIGNAL INC

1 patent

US5161945ANov 10, 1992

Turbine engine interstage seal

ALLIED SIGNAL INC41 citations87