Inventor
MULKENS JOHANNES C H
NL6 patents
⚠️ This page may combine multiple inventors who share the name “MULKENS JOHANNES C H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM LITHOGRAPHY BV
4 patentsUS6028660AFeb 22, 2000
Illumination unit for an optical apparatus
ASM LITHOGRAPHY BV37 citations89
US5508528AApr 16, 1996
Illumination unit having a facility for preventing contamination of optical components, and photolithographic apparatus including such an illumination unit
ASM LITHOGRAPHY BV22 citations89
US6067146AMay 23, 2000
Photolithographic apparatus
ASM LITHOGRAPHY BV14 citations71
US6239862B1May 29, 2001
Photolithographic apparatus
ASM LITHOGRAPHY BV4 citations60