Inventor
JUNG JAE-HYUNG
KR10 patents
⚠️ This page may combine multiple inventors who share the name “JUNG JAE-HYUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
9 patentsUS6430840B1Aug 13, 2002
Method of and apparatus for drying a wafer using isopropyl alcohol
SAMSUNG ELECTRONICS CO LTD29 citations91
US6235147B1May 22, 2001
Wet-etching facility for manufacturing semiconductor devices
SAMSUNG ELECTRONICS CO LTD40 citations91
US5715851AFeb 10, 1998
Wafer cassette and cleaning system adopting the same
SAMSUNG ELECTRONICS CO LTD33 citations90
US6896743B2May 24, 2005
Wafer drying methods of Marangoni type and apparatus suitable therefor
SAMSUNG ELECTRONICS CO LTD5 citations73
US6059986AMay 9, 2000
Wet station apparatus having quartz heater monitoring system and method of monitoring thereof
SAMSUNG ELECTRONICS CO LTD11 citations71
US7398801B2Jul 15, 2008
Apparatus and method for processing wafers
SAMSUNG ELECTRONICS CO LTD6 citations62
US7343922B2Mar 18, 2008
Wafer drying apparatus
SAMSUNG ELECTRONICS CO LTD5 citations62
US7793671B2Sep 14, 2010
Apparatus for and method of cleaning substrates
SAMSUNG ELECTRONICS CO LTD2 citations61
US5944939AAug 31, 1999
Wet station apparatus having quartz heater monitoring system and method of monitoring thereof
SAMSUNG ELECTRONICS CO LTD0 citations49