Inventor
YUN MIN-SANG
KR3 patents
Patents
3 patentsUS6100203AAug 8, 2000
Methods of employing aqueous cleaning compositions in manufacturing microelectronic devices
SAMSUNG ELECTRONICS CO LTD19 citations86
US6059986AMay 9, 2000
Wet station apparatus having quartz heater monitoring system and method of monitoring thereof
SAMSUNG ELECTRONICS CO LTD11 citations71
US5944939AAug 31, 1999
Wet station apparatus having quartz heater monitoring system and method of monitoring thereof
SAMSUNG ELECTRONICS CO LTD0 citations49