Inventor
CHADWICK CURT H
US17 patents
⚠️ This page may combine multiple inventors who share the name “CHADWICK CURT H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA INSTR CORP
9 patentsUS4877326AOct 31, 1989
Method and apparatus for optical inspection of substrates
KLA INSTR CORP263 citations97
US4618938AOct 21, 1986
Method and apparatus for automatic wafer inspection
KLA INSTR CORP247 citations95
US6141038AOct 31, 2000
Alignment correction prior to image sampling in inspection systems
KLA INSTR CORP82 citations92
US4639587AJan 27, 1987
Automatic focusing system for a microscope
KLA INSTR CORP81 citations92
US4556317ADec 3, 1985
X-Y Stage for a patterned wafer automatic inspection system
KLA INSTR CORP112 citations92
US4647764AMar 3, 1987
Rotational and focusing apparatus for turret mounted lenses
KLA INSTR CORP26 citations90
US4604910AAug 12, 1986
Apparatus for accurately positioning an object at each of two locations
KLA INSTR CORP21 citations80
US4889676ADec 26, 1989
Method of molding a precision surface on an instrument table
KLA INSTR CORP3 citations59
US5014627AMay 14, 1991
Stable instrument bench with replicated precision surface
KLA INSTR CORP1 citations48
GTE SYLVANIA INC
5 patentsUS4023891AMay 17, 1977
Adjustable mirror mount assembly
GTE SYLVANIA INC31 citations82
US4199735AApr 22, 1980
Optical compensation for thermal lensing in conductively cooled laser rod
GTE SYLVANIA INC8 citations73
US4170763AOct 9, 1979
Conductively cooled laser pumping assembly
GTE SYLVANIA INC6 citations60
US4181900AJan 1, 1980
Laser pumping assembly
GTE SYLVANIA INC4 citations55
US4183483AJan 15, 1980
Translating mechanism
GTE SYLVANIA INC3 citations54