Inventor
YASUDA ZENYA
JP5 patents
Patents
5 patentsUS6846227B2Jan 25, 2005
Electro-chemical machining appartus
SONY CORP81 citations97
US6797623B2Sep 28, 2004
Methods of producing and polishing semiconductor device and polishing apparatus
SONY CORP30 citations92
US7186322B2Mar 6, 2007
Methods of producing and polishing semiconductor device and polishing apparatus
SONY CORP14 citations83
US7255784B2Aug 14, 2007
Polishing method and electropolishing apparatus
SONY CORP6 citations73
US7156975B2Jan 2, 2007
Polishing method and electropolishing apparatus
SONY CORP5 citations73