Inventor
KAKUTANI MOMOKO
JP6 patents
Patents
6 patentsUS6921722B2Jul 26, 2005
Coating, modification and etching of substrate surface with particle beam irradiation of the same
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US6176619B1Jan 23, 2001
Water lubricated machine component having contacting sliding surfaces
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US5961218AOct 5, 1999
Water lubricated machine component having contacting sliding surfaces
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US6558822B2May 6, 2003
Cr-containing titanium nitride film
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US6767657B1Jul 27, 2004
Sliding member and manufacturing method therefor
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US6432257B1Aug 13, 2002
Dresser for polishing cloth and method for manufacturing such dresser and polishing apparatus
EBARA CORP6 citations60