Inventor

TACTIC-LUCIC SVETLANA

US2 patents

Patents

2 patents

US7299538B2Nov 27, 2007

Method for fabricating micro-electro-mechanical systems

WISPRY INC75 citations92

US7064637B2Jun 20, 2006

Recessed electrode for electrostatically actuated structures

WISPRY INC59 citations92