Inventor
WEI LANHUA
US17 patents
⚠️ This page may combine multiple inventors who share the name “WEI LANHUA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
THERMA WAVE INC
13 patentsUS6738138B2May 18, 2004
Small spot ellipsometer
THERMA WAVE INC122 citations98
US6714300B1Mar 30, 2004
Optical inspection equipment for semiconductor wafers with precleaning
THERMA WAVE INC30 citations92
US6608689B1Aug 19, 2003
Combination thin-film stress and thickness measurement device
THERMA WAVE INC26 citations92
US6583875B1Jun 24, 2003
Monitoring temperature and sample characteristics using a rotating compensator ellipsometer
THERMA WAVE INC22 citations92
US6515744B2Feb 4, 2003
Small spot ellipsometer
THERMA WAVE INC29 citations92
US7068370B2Jun 27, 2006
Optical inspection equipment for semiconductor wafers with precleaning
THERMA WAVE INC12 citations84
US7054006B2May 30, 2006
Self-calibrating beam profile ellipsometer
THERMA WAVE INC14 citations84
US6930771B2Aug 16, 2005
Optical inspection equipment for semiconductor wafers with precleaning
THERMA WAVE INC12 citations84
US6870621B2Mar 22, 2005
Small spot ellipsometer
THERMA WAVE INC12 citations84
US6856385B2Feb 15, 2005
Spatial averaging technique for ellipsometry and reflectometry
THERMA WAVE INC4 citations74
US6577384B2Jun 10, 2003
Spatial averaging technique for ellipsometry and reflectometry
THERMA WAVE INC9 citations74
US7342661B2Mar 11, 2008
Method for noise improvement in ellipsometers
THERMA WAVE INC3 citations62
US6894781B2May 17, 2005
Monitoring temperature and sample characteristics using a rotating compensator ellipsometer
THERMA WAVE INC0 citations52