Inventor
TAKATA YOSHIYUKI
JP21 patents
⚠️ This page may combine multiple inventors who share the name “TAKATA YOSHIYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SUMITOMO CHEMICAL CO
18 patentsUS7575850B2Aug 18, 2009
Chemically amplified resist composition
SUMITOMO CHEMICAL CO26 citations92
US7262321B2Aug 28, 2007
Salt suitable for an acid generator and a chemically amplified resist composition containing the same
SUMITOMO CHEMICAL CO42 citations92
US6835527B2Dec 28, 2004
Chemical amplifying type positive resist composition
SUMITOMO CHEMICAL CO48 citations92
US6537726B2Mar 25, 2003
Chemically amplified positive resist composition
SUMITOMO CHEMICAL CO25 citations92
US6495306B2Dec 17, 2002
Chemically amplified positive resist composition
SUMITOMO CHEMICAL CO30 citations92
US6475699B2Nov 5, 2002
Chemically amplified positive resist composition
SUMITOMO CHEMICAL CO34 citations92
US6495307B2Dec 17, 2002
Chemically amplified positive resist composition
SUMITOMO CHEMICAL CO20 citations83
US7175963B2Feb 13, 2007
Chemical amplification type positive resist composition and a resin therefor
SUMITOMO CHEMICAL CO9 citations73
US7132218B2Nov 7, 2006
Chemically amplified positive resist composition
SUMITOMO CHEMICAL CO7 citations73
US6274287B1Aug 14, 2001
Positive resist compositions comprising a hydroxyphenyl ketone
SUMITOMO CHEMICAL CO12 citations73
US7220532B2May 22, 2007
Chemical amplification type resist composition
SUMITOMO CHEMICAL CO7 citations63
US5807656ASep 15, 1998
Polyhydroxy compound and a positive photoresist containing the same
SUMITOMO CHEMICAL CO2 citations63
US7862980B2Jan 4, 2011
Salt suitable for an acid generator and a chemically amplified positive resist composition containing the same
SUMITOMO CHEMICAL CO2 citations62
US7803513B2Sep 28, 2010
Chemically amplified resist composition
SUMITOMO CHEMICAL CO2 citations61
US7566522B2Jul 28, 2009
Chemically amplified resist composition
SUMITOMO CHEMICAL CO6 citations59
US6815140B2Nov 9, 2004
Positive resist composition
SUMITOMO CHEMICAL CO1 citations52
US7572570B2Aug 11, 2009
Chemically amplified resist composition
SUMITOMO CHEMICAL CO1 citations51
US7998656B2Aug 16, 2011
Chemically amplified positive resist composition
SUMITOMO CHEMICAL CO0 citations50