Inventor
HURLEY KELLY
US5 patents
Patents
5 patentsUS6756268B2Jun 29, 2004
Modified source/drain re-oxidation method and system
MICRON TECHNOLOGY INC8 citations72
US5578505ANov 26, 1996
Methods for measuring the surface area of a semiconductor wafer
MICRON TECHNOLOGY INC5 citations71
US5899702AMay 4, 1999
Methods for measuring surface area
MICRON TECHNOLOGY INC4 citations60
US7271435B2Sep 18, 2007
Modified source/drain re-oxidation method and system
MICRON TECHNOLOGY INC0 citations50
US7037860B2May 2, 2006
Modified source/drain re-oxidation method and system
MICRON TECHNOLOGY INC0 citations50