Inventor

EBY RAYMOND K

US3 patents

Patents

3 patents

US7279046B2Oct 9, 2007

Method and apparatus for aligning patterns on a substrate

NANOINK INC26 citations90

US7060977B1Jun 13, 2006

Nanolithographic calibration methods

NANOINK INC54 citations90

US8043652B2Oct 25, 2011

Method and apparatus for aligning patterns on a substrate

NANOINK INC3 citations60