Inventor
DE JONGE ROEL
NL9 patents
⚠️ This page may combine multiple inventors who share the name “DE JONGE ROEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
7 patentsUS7345740B2Mar 18, 2008
Polarized radiation in lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV65 citations96
US7894040B2Feb 22, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations61
US7403267B2Jul 22, 2008
System and method for providing modified illumination intensity
ASML NETHERLANDS BV2 citations60
US8027026B2Sep 27, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations51
US7929116B2Apr 19, 2011
Polarized radiation in lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations51
US7283208B2Oct 16, 2007
Lithographic apparatus, method of manufacturing a device, and device manufactured thereby
ASML NETHERLANDS BV0 citations50
US7602475B2Oct 13, 2009
System and method for providing modified illumination intensity
ASML NETHERLANDS BV0 citations49