Inventor
JOE RAYMOND
US10 patents
Patents
10 patentsUS6799940B2Oct 5, 2004
Removable semiconductor wafer susceptor
TOKYO ELECTRON LTD23 citations92
US7129187B2Oct 31, 2006
Low-temperature plasma-enhanced chemical vapor deposition of silicon-nitrogen-containing films
TOKYO ELECTRON LTD20 citations91
US7022192B2Apr 4, 2006
Semiconductor wafer susceptor
TOKYO ELECTRON LTD18 citations84
US7737051B2Jun 15, 2010
Silicon germanium surface layer for high-k dielectric integration
TOKYO ELECTRON LTD8 citations83
US7387968B2Jun 17, 2008
Batch photoresist dry strip and ash system and process
TOKYO ELECTRON LTD15 citations82
US7326655B2Feb 5, 2008
Method of forming an oxide layer
TOKYO ELECTRON LTD12 citations82
US7165011B1Jan 16, 2007
Built-in self test for a thermal processing system
TOKYO ELECTRON LTD11 citations82
US8012859B1Sep 6, 2011
Atomic layer deposition of silicon and silicon-containing films
TOKYO ELECTRON LTD19 citations81
US7604841B2Oct 20, 2009
Method for extending time between chamber cleaning processes
TOKYO ELECTRON LTD3 citations61
US7964441B2Jun 21, 2011
Catalyst-assisted atomic layer deposition of silicon-containing films with integrated in-situ reactive treatment
TOKYO ELECTRON LTD6 citations60