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Inventor
BALDWIN-HENDRICKS TERESA
US
2 patents
Patents
2 patents
US8889334B2
Nov 18, 2014
Spin-on anti-reflective coatings for photolithography
HONEYWELL INT INC
10 citations
80
US8344088B2
Jan 1, 2013
Spin-on anti-reflective coatings for photolithography
HONEYWELL INT INC
4 citations
58